Once the front-end process has been completed, the
semiconductor devices are subjected to a variety of electrical tests to
determine if they function properly. The proportion of devices on the wafer
found to perform properly is referred to as the yield. Manufacturers are
typically secretive about their yields, but it can be as low as 30%.
The fab tests the chips on the wafer with an
electronic tester that presses tiny probes against the chip. The machine marks
each bad chip with a drop of dye. Currently, electronic dye marking is possible
if wafer test data is logged into a central computer database and chips are
"binned" (i.e. sorted into virtual bins) according to predetermined
test limits. The resulting binning data can be graphed, or logged, on a wafer
map to trace manufacturing defects and mark bad chips. This map can also be
used during wafer assembly and packaging.
Chips are also tested again after packaging, as the bond
wires may be missing, or analog performance may be altered by the package. This
is referred to as the "final test".
Usually, the fab charges for testing time, with prices in
the order of cents per second. Testing times vary from a few milliseconds to a
couple of seconds, and the test software is optimized for reduced testing time.
Multiple chip (multi-site) testing is also possible, because many testers have
the resources to perform most or all of the tests in parallel.
Chips are often designed with "testability
features" such as scan chains or a "built-in self-test"
to speed testing, and reduce testing costs. In certain designs that use
specialized analog fab processes, wafers are also laser-trimmed during the
testing, in order to achieve tightly-distributed resistance values as specified
by the design.
Good designs try to test and statistically manage corners (extremes of silicon
behavior caused by a high operating temperature combined with the
extremes of fab processing steps). Most designs cope with at least 64 corners.
1. A method for final testing a lot consisting of a predetermined
plurality of semiconductor devices, comprising the steps of:
Testing operation of a test system relative to a
predetermined set of test system performance characteristics;
if said test system fails to operate in accordance with
said predetermined set of test system performance characteristics, repairing
said test system and retesting operation of said test system until said test
system operates in accordance with said predetermined set of test system
performance characteristics;
certifying that said test system is operating in accordance
with said predetermined set of test system performance criteria;
testing a plurality of semiconductor device performance
characteristics of each of said lot of semiconductor devices with said test
system, said testing resulting in passing semiconductor devices operating in
accordance with said plurality of semiconductor device performance
characteristics and failing semiconductor devices not operating in accordance
with said plurality of semiconductor device performance characteristics;
subsequent to said testing of said lot of semiconductor
devices, testing operation of said test system relative to said predetermined
set of test system performance characteristics;
if said test system fails to operate in accordance with
said predetermined set of test system performance criteria subsequent to said
testing of said lot of semiconductor devices
repairing said test system and retesting operation of said
test system until said test system operates in accordance with said predetermined
set of test system performance characteristics, following repair of said test system restarting testing
each of said lot of semiconductor devices and subsequent to said restart of
testing of said lot of semiconductor devices retesting operation of said test
system;
if said test system operates in accordance with said
predetermined set of test system performance criteria subsequent to said
testing of said lot of semiconductor devices, recertifying that said test
system is operating in accordance with said predetermined set of test system
performance criteria; and packing and shipping said passing semiconductor devices.
2. The method according to claim 1, wherein said certifying
step further comprises comparing a plurality of test system performance
characteristics with a predetermined set of statistical rules.
3. The method according to claim 1, wherein said certifying
step further comprises comparing a plurality of test system performance
characteristics with a plurality of modified WECO rules.
4. The method according to claim 1, wherein at least one of
said predetermined set of performance criteria is certified during said step of
testing.
Research by : Adli
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